Tokyo Electron Limited (TEL) Introduces New 300mm High Productivity Thermal Processing...
Tokyo Electron Limited (TEL) Introduces New 300mm High Productivity Thermal Processing System, TELINDY PLUSTOKYO--(Business Wire)--Tokyo Electron Limited (TEL), a world leader in thermal processingsystems, today announced that the company will introduce TELINDY PLUSin April 2008 for high-volume manufacturing. TEL has shipped more than 500 TELINDY systems since 2006. Now TELintroduces TELINDY PLUS, the latest evolution in the TELINDY productline. TELINDY PLUS offers enhancements, such as increased productivityand platform performance. The new platform is capable of bothconventional processes, such as oxidation/anneal/LPCVD, and advancedprocesses, such as High-k dielectrics/LPRO/SiN/Low Temperature CVD,and in-situ dry gas cleaning. TELINDY batch thermal processing systems provide significantcost-of-ownership advantages over conventional furnaces. TELINDY PLUSincorporates key features, including improved FIMS and a newlydesigned wafer handling system resulting in a 20% O.H.T. (Over HeadTime) reduction. The system also offers optimal laminar flow andefficient heat exchange, resulting in reduced wafer handling time, anda 20+% reduction in N2 consumption, all while maintaining a tightercontrol of the reactor ambient temperature and smaller footprint. With the TELINDY PLUS, the TEL Thermal Processing group continuesto make breakthrough advancements in thermal processing technologythrough the ongoing development of more efficient reactors thataddress the technical requirements faced by semiconductormanufacturers in their efforts to develop sub-32nm nodes and beyond. About TEL TEL, established in 1963, is a leading supplier of innovativesemiconductor and FPD production equipment worldwide. In Japan, TELalso distributes computer network related products and electroniccomponents of global leading suppliers. To support this diverseproduct base, TEL is strategically located around the world. TEL is apublicly held company listed on the Tokyo Stock Exchange. www.tel.comTEL U.S. Holdings, AustinMichelle Pesez, firstname.lastname@example.orgCopyright Business Wire 2007
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