RASIRC Study Shows Improved Uniformity with New Steam Delivery Method

Paper Now Available at
http://www.rasirc.com/resources/whitepapers/whitepaper_uniformity.pdf
SAN DIEGO--(Business Wire)--RASIRC(R), the steam purification company, releases research
indicating that a new steam delivery method results in significant
improvement in uniformity throughout the furnace from oxides as thin
as 25 Angstroms to as thick as 150,000 Angstroms eliminating the need
for pyrolytic steam. The paper, Improved Uniformity through New Steam
Delivery Method, by Jeffrey Spiegelman, is available at
http://www.rasirc.com/resources/whitepapers/whitepaper_uniformity.pdf.

Semiconductor, flat panel, solar, and optical devices all use
oxide films as an essential feature. Uniformity of that oxide film is
an important factor determining device yield. When oxygen is part of
the process recipe, the partial pressure within the furnace tube will
not be uniform. In the study, RASIRC found that by eliminating the
oxygen gas, water vapor pressure stays relatively constant and film
uniformity improves across the furnace.

Four facilities with horizontal furnaces and one with a vertical
furnace participated in the study. Process recipe temperatures and run
times were kept constant. Existing water vapor generating technologies
were replaced with a RASIRC Steamer and hydrogen and oxygen gases were
eliminated. The total steam supplied was initially the same as the
replaced technology and then adjusted to maximize performance.

Different facilities using different methods--a bubbler,
vaporizer, and pyrolytic torch--all confirmed that a reduction in
background oxygen gas and an increase in water vapor pressure resulted
in better uniformity and increased oxide growth rate.

The RASIRC Steamer uses de-ionized water as its steam source,
eliminating all dependence on hydrogen and oxygen gas. It uses a
non-porous hydrophilic membrane that selectively allows water vapor to
pass. Membrane selectivity is significant, with water molecules
passing through it 1,000,000 times faster than nitrogen molecules.
Both temperature and water vapor flow rate can be controlled through
the RASIRC Steamer, enabling maximum performance.

About RASIRC

RASIRC products purify and deliver ultra pure liquids and gases.
RASIRC technology is the first to generate ultra high purity (UHP)
steam from de-ionized water. It reduces cost, improves yield, and
improves safety. RASIRC dryers, humidifiers and steam generators are
of critical importance for many applications in the semiconductor,
pharmaceutical, medical, biological, fuel cell, and power industries.
Custom systems are available upon request. Call 858-259-1220, e-mail
info@rasirc.com, or visit www.rasirc.com.

RASIRC
Jeffrey Spiegelman, 858-259-1220
js@rasirc.com
www.rasirc.com
or
A-R Marketing, Inc
Andrea Roberts, 858-451-8666
andrea@armarketinginc.com

Copyright Business Wire 2008