First 8'' MEMS Cluster Tool from Oerlikon on Its Way to Korea

BALZERS, Liechtenstein--(Business Wire)--
In June, u-IT Cluster Center (www.uitc.or.kr), a Korean RFID/USN
infrastructure facility providing foundry service of MEMS Sensors (USN
Fab) and RFID/USN related activities from design to testing of
RFID/USN products (RFID/USN Engineering Lab), signed a contract for
purchasing a CLUSTERLINE(R) 200 II manufacturing tool from Oerlikon
for 6" & 8" MEMS R&D and mass production.

With this decision, u-ITC is positioning to be one of the leaders
in next generation Wafer Processing development in Northeast Asia. The
CLUSTERLINE(R) will be installed at USN Fab located in the u-IT
Cluster Center, Songdo, Korea.

"We've evaluated the available Wafer production equipment and were
primarily impressed by Oerlikon," says Dr. Sang-Chul Shin, President
at u-IT Cluster Center. The CLUSTERLINE(R) is approved by major MEMS
and Semiconductor manufacturers worldwide, featuring excellent process
capabilities for production, not only for MEMS but also for UBM, BSM,
TFH, IC and other compound applications, where Oerlikon has
demonstrated technology and CoO leadership for many years.

"This high volume production platform of choice for highly
sophisticated and specialized applications offers many new
opportunities to the manufacturers," says Andreas Dill, Head of
Systems within Oerlikon. "We are proud that we have been selected as
the partner of choice. The fact that we have been rewarded with the
distinction 'VLSI 10 Best Award' for the ninth consecutive year proves
our dedication for making our customers successful. This is another
great reward for all our efforts to provide the Semiconductor Industry
with superior process and production solutions."

CLUSTERLINE(R) 200 II has a large installed base around the world
with major semiconductor manufacturers. The tool provides
state-of-the-art process capabilities coupled with flexibility to
enhance the system with additional customized features. The open
systems architecture allows easy tool configuration for PVD, Soft Etch
and PECVD. The new generation CLUSTERLINE(R) is fully process
compatible to previous CLUSTERLINE tools installed in the market place
while providing extendibility through innovative features that are
evident in improved overall performance.

Oerlikon - Enabling High Technology

Oerlikon (SWX: OERL) is one of the world's most successful
high-tech industrial groups specializing in machine and plant
engineering. The company is a leader in the field of industrial
solutions and innovative technologies for textile manufacture,
thin-film solar and thin-film coating, drive, precision and vacuum
systems. With roots in Switzerland and a long tradition stretching
back 100 years, Oerlikon is a global player with a workforce of more
than 19,000 at 170 locations in 35 different countries. The company's
sales amounted to CHF 5.6 billion, and it ranks either first or second
in the respective global markets. In 2007, approximately 5 percent of
the turnover was invested in research and development (CHF 274
million).

Oerlikon Balzers Coating Ltd.
Business Unit Systems
Sven E. Jarby, Head of Marketing & Communications,
+423 388 4878
Fax: +423 388 5426
sven.jarby@oerlikon.com
www.oerlikon.com
or
Corporate Communications
Burkhard Boendel, +41 58 360 96 05
Fax: +41 58 360 91 93
pr@oerlikon.com
www.oerlikon.com

Copyright Business Wire 2008