Rudolph Technologies and SEMATECH Extend Collaboration at UAlbany NanoCollege

Joint development research will focus on 3D TSV process control
ALBANY, N.Y.--(Business Wire)--
Rudolph Technologies, Inc. (NASDAQ: RTEC) and SEMATECH, the global consortium of
leading chipmakers, announced today that Rudolph has joined SEMATECH`s 3D
Interconnect Program at the College of Nanoscale Science and Engineering (CNSE)
of the University at Albany. The joint partnership is a continuation of
collaborative efforts in process characterization, with a new focus on 3D IC
(three-dimensional integrated circuits) processing and enhancing process control
of TSV (through-silicon vias) manufacturing. This is the second year that
Rudolph will serve as a Member of SEMATECH.

As a member of SEMATECH`s 3D program, Rudolph`s inspection and metrology
technologies will be applied to various projects including via depth and CD
metrology, metallization void detection, stacked wafer via alignment, wafer edge
defect detection and bump height coplanarity.

"The advanced device design and complex manufacturing requirements of 3D
packaging opens a new frontier of process control challenges. Rudolph is well
positioned, both with existing and emerging technologies, to be the
semiconductor industry`s premier TSV process control solution provider," stated
Ardy Johnson, Rudolph`s vice president of marketing.

Sitaram Arkalgud, director of 3D interconnect at SEMATECH added, "We are pleased
to welcome Rudolph as a partner. Rudolph`s proven expertise in defect detection,
characterization, and data analysis will be significant in developing
technologies and processes that will continue to drive implementation of
manufacturable and cost-effective 3D TSV processes."

Richard Brilla, vice president for strategy, alliances and consortia at CNSE,
said, "The addition of Rudolph Technologies` innovative metrology and
characterization capabilities will further enhance the leading-edge research
being conducted as part of SEMATECH`s 3D Interconnect Program at CNSE`s Albany
NanoTech. At the same time, it will build on the world-class research and
development at the UAlbany NanoCollege, which is providing critical solutions
for the world`s leading companies in the highly competitive global
nanoelectronics industry."

Editor Background

For 20 years, SEMATECH (www.sematech.org), the global consortium of leading
semiconductor manufacturers, has set global direction, enabled flexible
collaboration, and bridged strategic R&D to manufacturing. Today, we continue to
accelerate the next technology revolution with our nanoelectronics and emerging
technology partners.

UAlbany CNSE is the first college in the world dedicated to research,
development, education, and deployment in the emerging disciplines of
nanoscience, nanoengineering, nanobioscience, and nanoeconomics. In May 2007, it
was ranked as the world's number one college for nanotechnology and
microtechnology in the Annual College Ranking by Small Times magazine. CNSE's
Albany NanoTech Complex is the most advanced research enterprise of its kind at
any university in the world: a $4.5 billion, 800,000-square-foot complex that
attracts corporate partners from around the world and offers students a
one-of-a-kind academic experience. The UAlbany NanoCollege houses the only
fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration
line within 80,000 square feet of Class 1 capable cleanrooms. More than 2,000
scientists, researchers, engineers, students, and faculty work on site at CNSE's
Albany NanoTech Complex, from companies including IBM, AMD, SEMATECH, Toshiba,
ASML, Applied Materials, Tokyo Electron, Vistec Lithography and Atotech. For
more information, visit http://www.cnse.albany.edu/.

Rudolph Technologies is a worldwide leader in the design, development,
manufacture and support of high-performance process control metrology, defect
inspection and data analysis systems used by semiconductor device manufacturers.
Rudolph provides a full-fab solution through its families of proprietary
products that provide critical yield-enhancing information, enabling
microelectronic device manufacturers to drive down costs and time to market. The
company has enhanced the competitiveness of its products in the marketplace by
anticipating and addressing many emerging trends driving the semiconductor
industry's growth. Rudolph`s strategy for continued technological and market
leadership includes aggressive research and development of complementary
metrology and inspection solutions. Headquartered in Flanders, New Jersey,
Rudolph supports its customers with a worldwide sales and service organization.
Additional information can be found on the company`s web site at
www.rudolphtech.com.

Safe Harbor Statement

This press release contains forward-looking statements within the meaning of the
Private Securities Litigation Reform Act of 1995 (the "Act"). In some cases, you
can identify those so-called "forward-looking statements" by words such as
"may," "will," "would," "should," "expects," "plans," "anticipates," "believes,"
"feels," "estimates," "predicts," "potential," or "continue," or the negative of
those words and other comparable words. Rudolph wishes to take advantage of the
"safe harbor" provided for by the Act and cautions that actual results may
differ materially from those projected as a result of various factors, including
risks and uncertainties, many of which are beyond Rudolph`s control. Factors
that could cause actual results to differ materially from the expectations
expressed in such forward-looking statements, include, but are not limited to,
the impact of the slowdown in the overall economy, the uncertainty of the
current global political environment, the potential for terrorist attacks, the
potential for business disruptions due to infectious diseases, changes in
customer demands for our existing and new products, the timing, cancellation or
delay of customer orders and shipments, the timing of revenue recognition of
shipments, new product offerings from our competitors, changes in or an
inability to execute Rudolph`s business strategy, unanticipated manufacturing or
supply problems and changes in tax rules. Rudolph cannot guarantee future
results, levels of activity, performance, or achievements. The matters discussed
in this press release also involve risks and uncertainties as summarized in
Rudolph`s Form 10-K report for the year ended December 31, 2008 and other
filings with the Securities and Exchange Commission ("SEC"), which are available
at http://www.sec.gov, the SEC`s website, and at http://www.rudolphtech.com, the
Rudolph website. While these factors may be updated from time to time through
the filing of reports and registration statements with the SEC, Rudolph does not
assume any obligation to update the forward-looking information contained in
this press release.

Rudolph Technologies, Inc.
Investors:
Steven R. Roth, 973-448-4302
steven.roth@rudolphtech.com
or
Trade Press:
Virginia Becker, 952-259-1647
virginia.becker@rudolphtech.com

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