SUSS MicroTec Introduces New |Z| Probe®Technology for Wafer-Level RF Testing

The 1MX technology significantly improves the RF and microwave performance of
the |Z| Probe® Family of RF wafer probes
DRESDEN, Germany--(Business Wire)--
SUSS MicroTec Test Systems (FWB:SMH)(GER:SMH) has introduced 1MX Technology for
its line of on-wafer RF probes, the |Z| Probe. The new technology significantly
improves the high-frequency performance of the |Z| Probe by minimizing unwanted
signal loss, reflection, and crosstalk and by extending the frequency range.
Design enhancements provide test engineers with the new level of measurement
accuracy when characterizing nano-scaled RF and microwave devices.

Testing RF and microwave components at wafer level is a challenging task. To do
so, engineers need to connect measurement instrumentation such as the vector
network analyzer (VNA), which interprets signals in a "coaxial transmission
world", to the device under test (DUT), which exists in a "planar transmission
world". The meeting of these two worlds takes place at the RF wafer probe. SUSS
MicroTec`s |Z| Probe uses a patented technology to connect these two worlds with
the minimum amount of signal distortion and loss. In addition, the robust design
of the |Z| Probe ensures one million touchdowns, far exceeding wafer probes
using conventional technologies, making it an ideal choice for on-wafer RF
engineering and production test.

"The |Z| Probe family, with its unsurpassed lifetime and excellent contact
quality, reliability and repeatability providing lowest cost of ownership, is
now expanded with the new 1MX Technology", says Dr. Stojan Kanev, Director of
Marketing and Product Management at SUSS MicroTec. "It significantly improves
the insertion loss and return loss to values never seen before in the RF probing
technology and extends the frequency capabilities of our |Z| Probes up to 67
GHz."

The new |Z| Probes are available now. More information about 1MX Technology and
SUSS MicroTec`s complete on-wafer RF and microwave test solutions can be found
on www.zprobe.info.

About SUSS MicroTec

SUSS MicroTec Test Systems is a subsidiary of SUSS MicroTec AG, which is listed
in Deutsche Börse AG`s Prime Standard.

SUSS MicroTec is a leading supplier of process and test solutions for markets
such as 3D Integration, Advanced Packaging, MEMS, Nanotechnology and Compound
Semiconductor. SUSS` solutions enable its customers to increase process
performance while reducing cost of ownership and to meet the volume requirements
of fast growing markets with high-quality solutions.

SUSS MicroTec supports more than 8,000 installed mask aligners, coaters, bonders
and probe systems with a global infrastructure for applications and service.
SUSS is headquartered in Garching near Munich, Germany. For more information,
visit www.suss.com.

Sabine Radeboldt, Corporate Marketing Manager, SUSS MicroTec
Tel: +49 (0) 89 32007-395
E-Mail: sabine.radeboldt@suss.com

Copyright Business Wire 2009