Mattson Technology Wins Follow-on Orders for Suprema Photoresist Strip Systems From Major Foundry

FREMONT, CA, Dec 20 (MARKET WIRE) --
Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced
process equipment used to manufacture semiconductors, today announced
that a major foundry has placed follow-on orders for multiple Suprema
photoresist strip systems for expansion of its latest fab. The Supremas
will be used in front-end-of-line (FEOL), mid-of-line (MoL), and
back-end-of-line (BEOL) strip applications for high-volume production at
the 3X nanometer (nm) technology nodes and advanced device development at
the 2X nm nodes. The systems have already begun shipment in the fourth
quarter of 2010.

"These follow-on orders validate our customer's confidence in the
Suprema's reliability, productivity, and extendibility for
volume-production expansion and future node development," said Rene
George, vice president and general manager of Mattson Technology's Plasma
Products Group. "As the process tool of record for this foundry's 32 nm
line, Suprema is qualified on all FEOL strip applications -- including
bulk, high-dose implant strip (HDIS), low-dose implant strip (LDIS) --
and provides the innovative strip technology required to address the BEOL
cleaning challenges associated with advanced process nodes."

"These latest follow-on orders expands Mattson Technology's presence in
the foundry segment and reinforces the Suprema system's strip
leadership," continued George. "We will continue to provide our long-time
customer with advanced strip systems that deliver the high productivity,
low cost of ownership, and technology extendibility it requires for
leading-edge device production and next-generation process development."

About Mattson Technology, Inc.

Mattson Technology, Inc. designs, manufactures and markets semiconductor
wafer processing equipment used in the fabrication of integrated
circuits. We are a leading supplier of plasma and rapid thermal
processing equipment to the global semiconductor industry, and operate in
three primary product sectors: Dry Strip, Rapid Thermal Processing and
Etch. Through manufacturing and design innovation, we have produced
technologically advanced systems that provide productive and
cost-effective solutions for customers fabricating current- and
next-generation semiconductor devices. For more information, please
contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA,
94538. Telephone: (800) MATTSON/(510) 657-5900. Internet: www.mattson.com.

"Safe Harbor" Statement Under the Private Securities Litigation Reform
Act of 1995: This news release contains forward-looking statements.
Forward-looking statements address matters that are subject to a number
of risks and uncertainties that can cause actual results to differ
materially. Such risks and uncertainties include, but are not limited to:
end-user demand for semiconductors; customer demand for semiconductor
manufacturing equipment; the timing of significant customer orders for
the Company's products; customer acceptance of delivered products and the
Company's ability to collect amounts due upon shipment and upon
acceptance; the Company's ability to timely manufacture, deliver and
support ordered products; the Company's ability to bring new products to
market and to gain market share with such products; customer rate of
adoption of new technologies; risks inherent in the development of
complex technology; the timing and competitiveness of new product
releases by the Company's competitors; the Company's ability to align its
cost structure with market conditions; and other risks and uncertainties
described in the Company's Forms 10 K, 10-Q and other filings with the
Securities and Exchange Commission. The Company assumes no obligation to
update the information provided in this news release.

Mattson Technology Contact
Lauren Vu
Mattson Technology, Inc.
tel +1-510-492-6250
fax +1-510-492-5930
lauren.vu@mattson.com

Investor Contact
Laura Guerrant-Oiye
Guerrant Associates
tel +1-808-882-1467
lguerrant@guerrantir.com

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