Mattson Technology Helios XP RTP System Selected by Major Asian Foundry for Production and Development of Advanced

FREMONT, CA, Jan 11 (MARKET WIRE) --
Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced
process equipment used to manufacture semiconductors, today announced
that the Helios(R) XP rapid thermal processing (RTP) system was selected
by a major Asian foundry for 4X nanometer (nm) production and development
at the sub-4X nm technology nodes. The evaluation system, which expands
Mattson Technology's extensive RTP installed base at this customer, was
recently shipped and installed at the end of the fourth quarter 2010.

"This major Asian foundry customer's selection reinforces Mattson
Technology's strategic expansion into the critical foundry market," said
Andreas Toennis, senior vice president and general manager of Mattson
Technology's Thermal Products Group. "Our customer chose the Helios XP
for advanced device production and development at the 4X nm and below
regimes based on the exceptional performance of our patented
HotShield(TM) technology, which enables repeatable within-wafer and
wafer-to-wafer uniformity and reduces common thermal-related pattern
loading effects, resulting in excellent process yields."

"We appreciate the long-standing RTP relationship with our customer, and
we look forward to continuing to provide the reliable, high-productivity,
cost-effective RTP tools our customer requires to meet its future IC
manufacturing and development goals," concluded Toennis.

About Mattson Technology, Inc.
Mattson Technology, Inc. designs,
manufactures and markets semiconductor wafer processing equipment used in
the fabrication of integrated circuits. We are a leading supplier of
plasma and rapid thermal processing equipment to the global semiconductor
industry, and operate in three primary product sectors: Dry Strip, Rapid
Thermal Processing and Etch. Through manufacturing and design innovation,
we have produced technologically advanced systems that provide productive
and cost-effective solutions for customers fabricating current- and
next-generation semiconductor devices. For more information, please
contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA,
94538. Telephone: (800) MATTSON/(510) 657-5900. Internet: www.mattson.com.

"Safe Harbor" Statement Under the Private Securities Litigation Reform
Act of 1995: This news release contains forward-looking statements.
Forward-looking statements address matters that are subject to a number
of risks and uncertainties that can cause actual results to differ
materially. Such risks and uncertainties include, but are not limited to:
end-user demand for semiconductors; customer demand for semiconductor
manufacturing equipment; the timing of significant customer orders for
the Company's products; customer acceptance of delivered products and the
Company's ability to collect amounts due upon shipment and upon
acceptance; the Company's ability to timely manufacture, deliver and
support ordered products; the Company's ability to bring new products to
market and to gain market share with such products; customer rate of
adoption of new technologies; risks inherent in the development of
complex technology; the timing and competitiveness of new product
releases by the Company's competitors; the Company's ability to align its
cost structure with market conditions; and other risks and uncertainties
described in the Company's Forms 10 K, 10-Q and other filings with the
Securities and Exchange Commission. The Company assumes no obligation to
update the information provided in this news release.

Mattson Technology Contact
Lauren Vu
Mattson Technology, Inc.
tel +1-510-492-6250
fax +1-510-492-5930
lauren.vu@mattson.com

Investor Contact
Laura Guerrant-Oiye
Guerrant Associates
tel +1-808-882-1467
lguerrant@guerrantir.com

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