New Wafer Shipper Enhances LED Manufacturing

BILLERICA, Mass., Jan. 24, 2011 (GLOBE NEWSWIRE) -- Entegris, Inc. introduced a
wafer shipper that specifically meets the critical handling needs of thin
silicon (Si) and compound semiconductor wafers. The new Ultrapak(R) 100 mm Thin
Wafer Shipper is designed to reduce damage and contamination in order to better
protect thin substrates used in LED manufacturing and other applications. The
new product is being featured with other LED solutions at the Company's booth at
the SEMICON Korea 2011 tradeshow being held in Seoul, Korea on January 26, 2011.

Currently, the LED industry predominantly uses shippers designed for
semiconductor applications. These silicon wafer shippers are not designed for
thin Si and compound semiconductor applications and can cause wafer damage or
breakage, cross-slotting and particle generation via rotation if used in these
sensitive applications. The new Ultrapak 100 mm Thin Wafer Shipper, which
leverages the proven technology and design of Entegris' Ultrapak family of wafer
shipping products, offers several design features that help thin Si and compound
semiconductor manufacturers reduce these risks, including:

-- Cradle strap support (upper and lower cushions) of the wafer that limits
wafer rotation, thereby reducing particle contamination, and secures the
wafers in the cassette to safeguard against breakage.
-- Enhanced perimeter support of the substrate via extended upper cushion
and lower cushion to reduce stress levels during impact events during
transport.
-- Ultrapure polypropylene materials that provide a clean shipping
environment and assure low levels of outgassing to prevent haze or
changes to the wafer surface.
-- Robotic pickup flanges on the cassette to allow for convenient handling.
-- Center notch track alignment and an "H" bar to help assure accurate
equipment interoperability for both vertical and horizontal wafer
transfers.
-- Secondary packaging design that holds eight shippers at a time, helping
protect up to 200 wafers.

The Ultrapak 100 mm shipper successfully passes ISTA-2A procedure for free-fall
drop with 150um thick Ge wafers using Entegris' designed secondary packaging. It
also passed a battery of other functional tests using 300um, 200um, and 150um
thin wafers.

For more information, please contact your Entegris Regional Customer Service
Center.

ABOUT ENTEGRIS

Entegris provides a wide range of products for purifying, protecting and
transporting critical materials used in processing and manufacturing in
semiconductor and other high-tech industries. Entegris is ISO 9001 certified and
has manufacturing, customer service or research facilities in the United States,
China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and
Taiwan. Additional information can be found at www.entegris.com.

The Entegris, Inc. logo is available at
http://www.globenewswire.com/newsroom/prs/?pkgid=3700

CONTACT: Steve Cantor
VP of Corporate Relations
Tel. 978-436-6750
irelations@entegris.com