Entegris Announces Technology Collaboration With IBM

BILLERICA, Mass., Feb. 24, 2011 (GLOBE NEWSWIRE) -- Entegris, Inc. (Nasdaq:ENTG)
announced today a joint development agreement with IBM (NYSE:IBM) to develop and
test new filtration techniques for use in advanced semiconductor manufacturing.

The collaboration will focus on generating test data off of a new generation of
Entegris filters and dispense systems that are used to dispense and filter
imaging materials as part of the photolithography process in a semiconductor
fab. Entegris, which is the only provider of both filters and dispense systems
used for this application in the semiconductor industry, will work with IBM's
technology team in East Fishkill, New York to develop new technologies for
controlling impurities such as particles and bubbles that can negatively impact
manufacturing yields. The use of new materials, process chemistries, and
photolithography techniques are presenting new challenges for the semiconductor
industry as it develops technologies to manufacture next-generation chips that
are smaller, more powerful, and which consume less power.

Gideon Argov, president and CEO of Entegris, said. "This agreement complements
the work we have been doing with other industry consortia to demonstrate the
benefits of effective filtration on process yields in sub 32-nanometer node
semiconductor manufacturing. We are delighted to be able to partner with one of
the technology pioneers in our industry."

ABOUT ENTEGRIS

Entegris provides a wide range of products for purifying, protecting and
transporting critical materials used in processing and manufacturing in
semiconductor and other high-tech industries. Entegris is ISO 9001 certified and
has manufacturing, customer service or research facilities in the United States,
China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and
Taiwan. Additional information can be found at www.entegris.com.

The Entegris, Inc. logo is available at
http://www.globenewswire.com/newsroom/prs/?pkgid=3700

CONTACT: Steve Cantor
VP of Corporate Relations
Tel. 978-436-6750
irelations@entegris.com