Mattson Technology Reinforces Leadership in Strip Market With Introduction of New SUPREMA XP5 Dry Strip System Designed

FREMONT, CA, Mar 14 (MARKET WIRE) --
Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced
process equipment used to manufacture semiconductors, today introduced
SUPREMA(R) XP5, its latest photoresist dry strip system designed to
deliver the extendibility, performance, cost of ownership (CoO) and
reliability that chipmakers require for high-volume production of current
and future-generation logic, DRAM and flash memory devices. This newest
addition to the company's family of innovative products is based on the
production-proven, vacuum-based, high-throughput SUPREMA platform and
proprietary Faraday-Shielded Inductively Coupled Plasma (ICP) source
technology. SUPREMA XP5 provides the most flexible and cost-effective
solution for advanced front-end-of-line (FEOL) and back-end-of-line
(BEOL) strip applications using oxygen-based process chemistries.

"The introduction of SUPREMA XP5 reinforces Mattson Technology's
commitment to delivering high-performance, reliability and productivity
systems to our customers as they look to extend strip technology to
advanced nodes," said Rene George, vice president and general manager of
Mattson Technology's Plasma Products Group. "SUPREMA XP5 builds on
Mattson Technology's production-proven SUPREMA platform and provides the
best processing performance and CoO to meet current and next-generation
requirements of oxygen-based process applications. This new product
offering allows our customers to address their latest technological
challenges without sacrificing reliability or productivity and further
strengthens Mattson Technology's leading position in the strip market."

About SUPREMA XP5
The SUPREMA XP5's modular platform utilizes a
simplified vacuum-based wafer transfer architecture designed to meet
next-generation strip requirements with improved CoO, increased
reliability and best-of-class particle performance to meet
next-generation cleanliness requirements. The system features a
simplified, combined vacuum loadlock and transfer module with a unique
architecture to enable faster time to production and reduce the use of
moving and consumable parts to lower chipmakers' total capital costs.
SUPREMA XP5 provides the capability to run recipes at higher source power
and features improved system packaging to simplify and lower costs
related to installation, maintenance and serviceability.

SUPREMA XP5's patented Faraday-Shielded ICP source technology provides
the industry's widest process window to achieve superior on-wafer
processing results with the highest strip rates available today. Designed
to address all oxygen-based strip process requirements, SUPREMA XP5
features reliable, high-speed vacuum and atmospheric robotics to deliver
higher productivity with throughput of greater than 430 wafers per hour.
The SUPREMA XP5 is positioned to set a new benchmark for strip
performance, with exceptional process flexibility, efficiency,
reliability and CoO for high-volume manufacturing of advanced chips down
through the 2X nanometer (nm) node.

About Mattson Technology, Inc.

Mattson Technology, Inc. designs, manufactures and markets semiconductor
wafer processing equipment used in the fabrication of integrated
circuits. The company is a leading supplier of plasma and rapid thermal
processing equipment to the global semiconductor industry, and operates
in three primary product sectors: dry strip, rapid thermal processing
(RTP) and etch. Through manufacturing and design innovation, Mattson
Technology produces technologically advanced systems that provide
productive and cost-effective solutions for customers fabricating
current- and next-generation semiconductor devices. The company serves
foundries, and memory and logic integrated device manufacturers in the
United States, Europe, China, Japan, Korea, Singapore, Taiwan and other
Asian countries. For more information, please contact Mattson Technology,
Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone:
+1-800-MATTSON/+1-510-657-5900. Internet: www.mattson.com.

"Safe Harbor" Statement Under the Private Securities Litigation Reform
Act of 1995: This news release contains forward-looking statements.
Forward-looking statements address matters that are subject to a number
of risks and uncertainties that can cause actual results to differ
materially. Such risks and uncertainties include, but are not limited to:
end-user demand for semiconductors; customer demand for semiconductor
manufacturing equipment; the timing of significant customer orders for
the Company's products; customer acceptance of delivered products and the
Company's ability to collect amounts due upon shipment and upon
acceptance; the Company's ability to timely manufacture, deliver and
support ordered products; the Company's ability to bring new products to
market and to gain market share with such products; customer rate of
adoption of new technologies; risks inherent in the development of
complex technology; the timing and competitiveness of new product
releases by the Company's competitors; the Company's ability to align its
cost structure with market conditions; and other risks and uncertainties
described in the Company's Forms 10 K, 10-Q and other filings with the
Securities and Exchange Commission. The Company assumes no obligation to
update the information provided in this news release.

Mattson Technology Contact
Lauren Vu
Mattson Technology, Inc.
tel +1-510-492-6250
fax +1-510-492-5930
lauren.vu@mattson.com

Investor Contact
Laura Guerrant-Oiye
Guerrant Associates
tel +1-808-882-1467
lguerrant@guerrantir.com

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