Mattson Technology, Inc. Prices Underwritten Public Offering of Common Stock

FREMONT, CA, May 11 (MARKET WIRE) --
Mattson Technology, Inc. (NASDAQ: MTSN) today announced that it has
priced its previously announced underwritten public offering of 6,800,000
shares of its common stock at a price to the public of $1.80 per share.
The offering is expected to close on or about Monday, May 16, 2011,
subject to satisfaction of customary closing conditions. Mattson
Technology granted the underwriters a 30-day option to purchase at the
public offering price up to an additional 1,020,000 shares of its common
stock to cover over-allotments, if any. After deducting the underwriting
discount but before deducting estimated offering expenses payable by the
Company, the Company expects to receive net proceeds of approximately
$11,492,000, assuming no exercise of the over-allotment option.

Needham & Company, LLC is acting as sole book running manager and Rodman
& Renshaw, LLC and Roth Capital Partners are acting as co-managers for
the offering.

Mattson Technology intends to use the net proceeds from this offering for
general corporate purposes, which may include working capital, capital
expenditures, other corporate expenses, and acquisitions of complementary
products, technologies or businesses.

A shelf registration statement relating to the shares of common stock was
previously filed with the Securities and Exchange Commission (the "SEC")
and declared effective on September 30, 2010. A preliminary prospectus
supplement relating to the offering has been filed with the SEC and a
prospectus supplement relating to the offering will be filed with the SEC
and will be available on the SEC's website at http://www.sec.gov. Copies
of the prospectus supplement and accompanying prospectus, when available,
may be obtained from Needham & Company, LLC, 445 Park Avenue, New York,
NY 10022, (800) 903-3268.

This press release shall not constitute an offer to sell or the
solicitation of an offer to buy these securities, nor shall there be any
sale of these securities in any state or other jurisdiction in which such
offer, solicitation or sale would be unlawful prior to registration or
qualification under the securities laws of any such state or other
jurisdiction.

"Safe Harbor" Statement Under the Private Securities Litigation Reform
Act of 1995:

This press release contains forward-looking statements within the meaning
of the federal securities laws. These statements involve risks and
uncertainties that could cause actual results to differ materially,
including, but not limited to, the satisfaction of customary closing
conditions and whether or not Mattson Technology will consummate the
offering, prevailing market conditions, the anticipated use of the
proceeds of the offering which could change as a result of market
conditions or for other reasons, and the impact of general economic,
industry or political conditions in the United States or internationally.
There can be no assurance that Mattson Technology will be able to
complete the offering on the anticipated terms, or at all. Additional
risks and uncertainties relating to the offering, Mattson Technology and
its business can be found under the heading "Risk Factors" in Mattson
Technology's Quarterly Report on Form 10-Q for the quarter ended April 3,
2011, in the preliminary prospectus supplement relating to the offering
and in the prospectus supplement relating to the offering to be filed
with the Securities and Exchange Commission. Mattson Technology assumes
no duty or obligation to update or revise any forward-looking statements
for any reason.

About Mattson Technology, Inc.
Mattson Technology, Inc. designs,
manufactures and markets semiconductor wafer processing equipment used in
the fabrication of integrated circuits. We are a leading supplier of
plasma and rapid thermal processing equipment to the global semiconductor
industry, and operate in three primary product sectors: dry strip, rapid
thermal processing and etch. Through manufacturing and design innovation,
we have produced technologically advanced systems that provide productive
and cost-effective solutions for customers fabricating current- and
next-generation semiconductor devices.

Mattson Technology Contact
Andy Moring
Chief Financial Officer
Mattson Technology, Inc.
tel 510-657-5900
fax 510-492-5963
andy.moring@mattson.com

Investor & Media Contact
Laura Guerrant-Oiye, Principal
Guerrant Associates
tel 808-882-1467
lguerrant@guerrantir.com

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