Brooks Automation Vacuum Quality Monitor Offers Speed, Accuracy, and Exceptional...

Brooks Automation Vacuum Quality Monitor Offers Speed, Accuracy, and Exceptional
UHV Performance

CHELMSFORD, Mass., June 13, 2011 (GLOBE NEWSWIRE) -- Brooks Automation, Inc.
(Nasdaq:BRKS) announces the continued roll-out of the Simplicity Solutions(TM)
Model 830 Vacuum Quality Monitor (VQM(TM)) from its Granville-Phillips(R)
Product Center in Longmont Colorado. Vacuum technologists are finding that in
addition to knowing the pressure of their chamber, understanding the gas
composition can be equally as important. The 830 VQM transforms complex
measurement data into comprehensive, easily used information over the complete
1-135 amu measurement range under vacuum pressures from UHV to 10-5 Torr.

The technology behind this breakthrough is an autoresonant ion trap which
represents an entirely new way of mass selection. It starts with ion creation
which includes capturing all ions within the trap; an electrostatic field keeps
the ions oscillating within the trap at their resonant frequency; and the ions
are ejected through an autoresonant energy pumping process using a low amplitude
RF frequency scan. This technique delivers many advantages, including speed (85
msec for a 1-135 amu scan), low power consumption (8 W typical), small size,
simple calibration, and remote sensor operation meaning the electronics can be
remote from the sensor and any controller can drive any sensor.

"I am impressed with the UHV sensitivity of the VQM," said Jonathan Denlinger,
Staff Scientist at Lawrence Berkeley Laboratory. "The VQM spectra provided a
more accurate representation of the gas composition than my quadrupole RGA."

"We are very excited about the new autoresonant ion trap technology and the VQM
product," said Joergen Olsson, GM of Brooks Automation's Granville-Phillips
Product Center. "Customers are realizing the benefits and see this product as a
significant extension to our current line of vacuum gauges."

The 830 VQM system is available now and consists of an ion trap mass
spectrometer gauge, a VQM Controller and VQM Viewer software that provides the
ratio of each gas to others in the measurement range, and, with the addition of
the 390 total pressure measurement kit, the partial pressures of each gas.

For more information go to www.brooks.com or email vqm@brooks.com.

About Brooks Automation, Inc.

Brooks is a leading worldwide provider of automation, vacuum and instrumentation
solutions to the global semiconductor and related industries. Our products and
services are meeting the needs of customers across a broad spectrum of
applications and industries and the global semiconductor manufacturing sector is
our largest served market. When demanding productivity and availability
objectives are essential factors for success, customers throughout the world
turn to Brooks Automation, Inc.

CONTACT: Brooks Automation, Inc.
Barbara Culhane
Corporate Marketing Manager
978-262-2400
barbara.culhane@brooks.com