Dow Unveils First CMP Polishing Pads from its IKONIC Platform; Brings New, Advanced Materials to the Semiconductor Market

Fri Feb 1, 2013 9:43am EST

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PHILADELPHIA--(Business Wire)--
Following the introduction of its IKONIC chemical mechanical planarization (CMP)
polishing pad platform in late 2012, Dow Electronic Materials, a business unit
of The Dow Chemical Company (NYSE:DOW), today launched the first pads from its
new IKONIC 2000 and IKONIC 3000 polishing pad series. All pads in the IKONIC CMP
polishing pad platform are designed for use at the 28nm manufacturing node and
below, with IKONIC 2000 polishing pads targeting copper barrier, HKMG and
buffing applications, and IKONIC 3000 polishing pads developed initially for use
in bulk copper polishing. 

"We are setting a new benchmark in performance with the launch of the first pads
from our new IKONIC pad platform," said Colin Cameron, CMP global marketing
director for Dow Electronic Materials. "The new technology used in Dow`s IKONIC
polishing pads will support our customers` ever-evolving technical requirements
demanded by their most advanced processes." 

The first of the new pads, IKONIC 2020H, achieves defectivity levels
significantly lower than traditional pads while maintaining removal rate.
Additionally, every pad in the IKONIC 2000 series is formulated to be easily
conditioned for optimal texture and longer pad life time. This improves
polishing consistency and lowers overall cost of ownership. 

IKONIC 3040M is the first polishing pad in the IKONIC 3000 series. This pad
delivers a significant reduction in scratch defects compared to other bulk
copper pads. Additionally, IKONIC 3040M demonstrates improved topography
performance and lower cost of ownership. This pad is available in a range of
configurations and options for multiple applications. 

"While the IKONIC 2020H and IKONIC 3040M pads are being introduced today,
additional pads are in active development in each series that are designed to
address a myriad of customer specific requirements. Our IKONIC platform combines
a unique set of chemistries with flexible design density, thus allowing us to
offer our customers a wide range of customized solutions," said Cameron. 

Samples are currently available and in beta testing with multiple customers. 

About Dow

Dow (NYSE: DOW) combines the power of science and technology to passionately
innovate what is essential to human progress. The Company connects chemistry and
innovation with the principles of sustainability to help address many of the
world's most challenging problems such as the need for clean water, renewable
energy generation and conservation, and increasing agricultural productivity.
Dow's diversified industry-leading portfolio of specialty chemical, advanced
materials, agrosciences and plastics businesses delivers a broad range of
technology-based products and solutions to customers in approximately 160
countries and in high growth sectors such as electronics, water, energy,
coatings and agriculture. In 2011, Dow had annual sales of $60 billion and
employed approximately 52,000 people worldwide. The Company's more than 5,000
products are manufactured at 197 sites in 36 countries across the globe.
References to "Dow" or the "Company" mean The Dow Chemical Company and its
consolidated subsidiaries unless otherwise expressly noted. More information
about Dow can be found at www.dow.com. 

About Dow Electronic Materials

Dow Electronic Materials, a global supplier of materials and technologies to the
electronics industry, brings innovative leadership to the semiconductor,
interconnect, finishing, photovoltaic, display, LED and optics markets. From
advanced technology centers worldwide, teams of talented Dow research scientists
and application experts work closely with customers, providing solutions,
products and technical service necessary for next-generation electronics. These
partnerships energize Dow's power to invent. Its key end-use applications
include a broad range of consumer electronics from personal computers, to
television monitors, smart phones and tablets and other mobile devices as well
as electronic devices and systems used in a variety of industries. More
information about Dow Electronic Materials can be found at
http://www.dowelectronicmaterials.com

Company Contact:
Semiconductor Inquiries:
Robin Sprague
Dow Electronic Materials
Tel: +1 302 366-0500, ext. 6157
E-Mail: rsprague@dow.com
Media Contact:
Amy Smith
Impress Labs
Tel: +1 401 369 9266
E-Mail: amy@impresslabs.com

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