Applied Materials' Randhir Thakur Named IEEE Fellow for Groundbreaking Contributions to Microchip Fabrication

Wed Apr 3, 2013 7:30am EDT

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 SANTA CLARA, Calif., April 3, 2013 - Dr. Randhir Thakur, executive vice president and general
manager of the Silicon Systems Group  at Applied
Materials, Inc. has been named Fellow of the Institute of Electrical and Electronics Engineers
(IEEE ). Fellow is the highest grade of IEEE membership and is
recognized by the technical community as a prestigious honor and an important career achievement.
The grade of Fellow is conferred by the IEEE Board of Directors upon a person with an
extraordinary record of accomplishments in any of the IEEE fields of interest. 

Dr. Thakur  is recognized for
his leadership in development and implementation of single-wafer technology in semiconductor
manufacturing. Dr. Thakur's noted achievements in the development and commercialization of
single-wafer rapid thermal processing (RTP ) technology led to
significant improvements in device performance and manufacturing cycle time when compared to
conventional batch methods. Single-wafer RTP refers to a semiconductor manufacturing process which
quickly heats individual silicon wafers up to 1,200°C or more. 

"For over two decades, Randhir has been committed to his vision of enabling modern transistor
fabrication through single-wafer equipment technology," said Applied Materials chairman and chief
executive officer, Mike Splinter . "I am proud Randhir realized
his vision at Applied Materials. He built our Front End Products business unit into a major
division within Applied and he now runs our entire semiconductor equipment group." 

Dr. Thakur systematically developed RTP applications in the areas of oxidation, dopant activation,
heated reflow and foundational work in metrology and control. His seminal work has led to the
widespread adoption of RTP technology in the manufacture of dynamic random access memory (DRAM)
integrated circuits, where RTP enabled scaling below the 0.6 micron technology node and ultimately
into the sub-50 nanometer regime. Once proven in DRAM manufacturing, RTP found widespread adoption
in the manufacture of other devices such as logic, non-volatile memory, analog and
microelectromechanical systems (MEMS). Today, RTP is a fundamental enabling technology in the
fabrication of the most advanced semiconductor devices. Dr. Thakur also championed the vision
of integrating RTP and other semiconductor processes such as deposition, in a single machine, to
enable improved transistor performance. He correctly forecasted the need for ambient environment
control and interface management in single wafer processing, requiring multi-chamber tools that
are now standard in advanced semiconductor manufacturing. 

Dr. Thakur received a Bachelor of Science degree with honors in electronics and telecommunications
engineering from the Regional Engineering College, Kurukshetra, India. He received a Master of
Science degree in electrical engineering from the University of Saskatchewan, Canada, and a Ph.D.
in electrical engineering from the University of Oklahoma. He holds more than 300 patents and has
published more than 200 papers, with the majority focusing on single-wafer semiconductor process

Dr. Thakur successfully transitioned from technical leadership into executive business leadership
roles. His experience includes senior positions at Micron, SanDisk, Marvell Technology and Applied

Applied Materials, Inc. (Nasdaq:AMAT) is the global leader in providing innovative equipment,
services and software to enable the manufacture of advanced semiconductor, flat panel display and
solar photovoltaic products. Our technologies help make innovations like smartphones, flat screen
TVs and solar panels more affordable and accessible to consumers and businesses around the world.
Learn more at .

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Connie Duncan  (editorial/media)
Michael Sullivan  (financial community)


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Source: Applied Materials via Thomson Reuters ONE


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