Axcelis Announces Joint Development Program With Kingstone Semiconductor

BEVERLY, Mass., July 14, 2009 (GLOBE NEWSWIRE) -- Axcelis Technologies, Inc.
(Nasdaq:ACLS), a leading supplier of innovative, high-productivity solutions for
the semiconductor industry, announced today that it has formed an alliance with
Kingstone Semiconductor Company Ltd. to jointly develop advanced ion
implantation equipment and technology. Kingstone is an independent developer of
semiconductor equipment based in Shanghai, China.

Mary Puma, chairman and CEO, commented, "The goal of this alliance is
multi-faceted. The unique semiconductor systems expertise at Kingstone will
allow us to explore enabling ion implantation solutions for next generation
device manufacturing. In addition, it expands Axcelis' footprint, enhancing our
customer relationships and increasing our global sourcing opportunities in
Asia." She added, "Axcelis is focused on continuing to invest in leading edge
technology and strengthening our commitment to customer service. This
relationship ensures that we will continue to deliver the best products and
support to our customers."

Axcelis maintains a strong local presence throughout the Asia-Pacific region,
with offices in Beijing, Shanghai and Tianjin, China as well as in Taiwan,
Korea, Singapore, Malaysia and Japan.

Safe Harbor Statement

This document contains forward-looking statements under the SEC safe harbor
provisions. These statements, which include our expectations for benefits from a
joint development agreement, are based on management's current expectations and
should be viewed with caution. They are subject to various risks and
uncertainties, many of which are outside the control of the Company, including
the timing and effectiveness of product development programs, timing of orders
and shipments, the conversion of orders to revenue in any particular quarter, or
at all, our ability to implement successfully our profit plans, the continuing
demand for semiconductor equipment, relative market growth, continuity of
business relationships with and purchases by major customers, competitive
pressure on sales and pricing, increases in material and other production costs
that cannot be recouped in product pricing and global economic, political and
financial conditions. These risks and other risk factors relating to Axcelis are
described more fully in the most recent Form 10-K filed by Axcelis and in other
documents filed from time to time with the Securities and Exchange Commission.

Axcelis Technologies, Inc. (Nasdaq:ACLS) headquartered in Beverly,
Massachusetts, provides innovative, high-productivity solutions for the
semiconductor industry. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life cycle support of
ion implantation and cleaning systems. The company's Internet address is:
www.axcelis.com.

Kingstone Semiconductor Company Ltd. headquartered in Shanghai, China, is led by
a multinational team renowned in the field of ion implantation. Kingstone
believes that its focus on developing and manufacturing leading edge technology
based on customer requirements and feedback set it apart from its competition.

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CONTACT: Axcelis Technologies, Inc.
Editorial/Media
Maureen Hart
978.787.4266
Financial Community
Stephen Bassett
978.787.4000