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Global 450mm Consortium selects Dainippon Screen Mfg Co Ltd's SOKUDO Immersion ArF Lithography Track

Monday, 24 Feb 2014 01:00am EST 

Dainippon Screen Mfg Co Ltd:Has confirmed subsidiary company's SOKUDO DUO 450mm coat/develop track system has been chosen by the Global 450mm Consortium (G450C), for immersion ArF lithography and Directed Self-Assembly (DSA) applications.Says the SOKUDO DUO will be added to Dainippon Screen's suite of 450mm cleaning equipment in CNSE's NanoFab Xtension. 

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20 Oct 2014