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Axcelis Technologies Inc And Lam Research Corp Announces Strategic Collaboration Agreement On Ion Implant, Dry-Strip, And Etch

Tuesday, 4 Dec 2012 08:01am EST 

Axcelis Technologies Inc and Lam Research Corp., announced a strategic collaboration agreement focusing on the interrelationship between ion implantation, etch processes, and photoresist strip applications, including material modification implants and high-dose implant strip (HDIS). Separately, Axcelis decided that it will exit the dry-strip business and divest dry-strip intellectual property and technology, including the advanced non-oxidizing process technology of Integra product line, to Lam Research, allowing Axcelis to focus exclusively on the ion implant market. Axcelis will continue to ship 300 mm dry-strip products through August 2013, and support the Axcelis installed base indefinitely, including all existing parts and service contracts. 

Company Quote

-0.01 -0.55%
20 Aug 2014